Presentation Information
[23a-1BL-8]Optical interferometry of laser generated ultrasound on a sample surface
〇(M1)Sotaro Komatsu1, Hayasaki Yoshio1 (1.Utsunomiya Univ. CORE)
Keywords:
interferometry,ultrasound
In order to use the ultrasonic waves generated during laser processing to observe the processing state, we propose an optical interferometry method to measure the ultrasonic waves. The measurement method is described below. A laser for vibration detection, which is divided into two parts by a diffraction grating, is focused on the surface of the sample where ultrasonic waves propagate, and the measurement is made from the difference in distance between the two points and the processing point. This optical interferometer has a structure that is resistant to vibration because the lasers are coaxial.