Presentation Information
[23a-1BL-9]On-machine measurement using optical interferometry in holographic laser processing
〇(M1)ren umetsu1 (1.Utsunomiya Univ.)
Keywords:
optical interferometer,femtosecond laser
Material ablation by ultrafast laser pulses enables precision microfabrication of all kinds of materials and is used for a wide variety of applications. Therefore, ultrafast laser ablation is expected to play an important role in the mass customization of future manufacturing. Here, a wide range of laser irradiation conditions influence the processed structures, such as wavelength, pulse duration, pulse energy, repetition frequency, and number of pulses. In general, finding the optimal laser irradiation conditions to obtain the desired structure requires a lot of trial and error for even the most skilled laser operator. In this study, on-machine measurement of the processed structure was proposed for efficient search of laser irradiation conditions.