Presentation Information
[23a-22A-7]Formation of n-type GeSn (Sn: ~25%) epitaxial layer using in-situ Sb doping
〇Shigehisa Shibayama1, Komei Takagi1, Mitsuo Sakashita1, Masashi Kurosawa1, Osamu Nakatsuka1,2 (1.Nagoya Univ., 2.IMass, Nagoya Univ.)
Keywords:
GeSn,InP,Mid infrared