[23a-61B-1~12] 【Open Symposium】Challenge to the Future - Vision of Future Society Pioneered by Cutting-Edge Semiconductors

10:40 AM - 10:50 AM JST(1:40 AM - 1:50 AM UTC)

[23a-61B-6] Nikon's challenges and future vision in the semiconductor equipment business (exposure, metrology and inspection)

〇Tasuku Kato¹ (1.Nikon Corporation)

Keywords:

semiconductor,equipment