Presentation Information
[23a-P08-8]Spin-coat deposition of conductive polyaniline thin films toward surface ultra-flattening
〇(M1C)Yuta Kitamura1, Ryuka Umemoto1, Yuka Shimada1, Ryoya Kai1, Satoru Kaneko2,1, Mamoru Yoshimoto1, Akifumi Matsuda1 (1.Tokyo Tech, 2.KISTEC)
Keywords:
polyaniline,spin-coating,surface flatness
In this study, synthesis of polyaniline (PANI) thin films by spin-coating and the control of surface morphology by the deposition conditions was investigated in purpose of preparing flat surface for atomic-scale thermal nanoimprinting. Spin-coating of aqueous polyaniline solutions with self-doping function was performed on quartz glass substrates at different polyaniline solution concentrations. The effects of aqueous solution concentration on surface flatness and conductivity were evaluated, and it was found that the 80 g/L solution was appropriate for the synthesis of nanoimprint precursor thin films.