[23p-12A-1~9] 3.2 Information photonics and image engineering (formerly 3.3)

1:30 PM - 1:45 PM JST(4:30 AM - 4:45 AM UTC)

[23p-12A-1] Shape measurement using line digital holography

〇(B)Yuma Sato¹, Yoshio Hayasaki¹ (1.Utsunomiya Opt.)

Keywords:

digital holography

Digital holography (DH) is suitable for the measurement of semiconductor packages because of the need for high-precision inspection of semiconductor components, and we propose a method to improve the measurement speed by using DH with high resolution and a one-dimensional input image. The performance evaluation of the constructed line digital holography is described, assuming a situation in which an inspection target placed on a conveyor moves at a constant velocity in one axis direction.