Presentation Information
[23p-12G-2]Growth and characterization of Bi2Se3 ultrathin films by MBE with a single evaporation source
〇Shinichiro Hatta1, Kenjiro Fukasawa1, Hiroshi Okuyama1, Tetsuya Aruga1 (1.Kyoto Univ.)
Keywords:
topological insulator,ultrathin film,MBE
We have investigated the thin film growth of Bi2Se3 by molecular beam epitaxy. Although two separate evaporation sources of Bi and Se are generally used, we evaporated polycrystalline granular Bi2Se3 from a crucible made of Ta. The deposition was done on the Bi-terminated Si(111) substrate at room temperature followed by postannealing at ~470 K. The evolution of band structure measured by angle-resolved photoelectron spectroscopy revealed the layer-by-layer growth of the (111)-oriented Bi2Se3 films.