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3:00 PM - 3:15 PM JST(6:00 AM - 6:15 AM UTC)

[23p-12G-6][The 8th Thin Film and Surface Physics Division Young Researcher Award Speech] Roles of excess minority carrier recombination and chemisorbed O₂ species at SiO₂/Si interfaces in Si dry oxidation

〇Yasutaka Tsuda¹, Akitaka Yoshigoe¹, Shuichi Ogawa², Tetsuya Sakamoto¹, Yoshiki Yamamoto³, Yukio Yamamoto³, Yuji Takakuwa^1,4 (1.JAEA, 2.Nihon univ, 3.NIT, Fukui Col., 4.Tohoku univ.)

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Thin Film and Surface Physics Division

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Presentation Information

[23p-12G-6][The 8th Thin Film and Surface Physics Division Young Researcher Award Speech] Roles of excess minority carrier recombination and chemisorbed O2 species at SiO2/Si interfaces in Si dry oxidation

Keywords:

[23p-12G-6][The 8th Thin Film and Surface Physics Division Young Researcher Award Speech] Roles of excess minority carrier recombination and chemisorbed O₂ species at SiO₂/Si interfaces in Si dry oxidation