Presentation Information

[23p-12M-12]Structural control of amorphous silica films using crystalline substrates

〇(M1)Sohei Ogasawara1, Katelyn A. Kirchner2, Kazuro Kizaki1, Hiroo Tajiri3, Shinji Kohara4, Hiromichi Ohta5, John C. Mauro2, Yasutaka Matsuo5 (1.Tohoku Univ., 2.Penn State Univ., 3.JASRI, 4.NIMS, 5.Hokkaido Univ.)

Keywords:

silica glass

For easier structural control of silica amorphous materials, we attempted to control the structure by chemical pressure by preparing SiO2 amorphous thin films on Si crystalline substrates. In the present study, thinner SiO2thin films showed a shift of the peak reflecting the amorphous mid-range structure and a decrease of the thermal conductivity. This suggests that the thinner films are more strongly affected by the substrate effect, and are in a different state than the bulk samples.