[23p-12N-1~15] 11.2 Thin and thick superconducting films, coated conductors and film crystal growth

3:30 PM - 3:45 PM JST(6:30 AM - 6:45 AM UTC)

[23p-12N-8] Image Alignment for Improvement of Process Condition Estimation Accuracy based on Plume Images

〇Keiichi Horio^1,5, Shuntaro Yamazaki², Yusuke Ichino^3,5, Ataru Ichinose^4,5, Tomoya Horide^2,5, Kaname Matsumoto^2,5, Yutaka Yoshida^2,5 (1.Kyushu Inst. of Tech., 2.Nagoya Univ., 3.Aichi Inst. of Tech., 4.CRIEPI, 5.JST-CREST)

Keywords:

thin film generation,plume image,estimation of process condition

When estimating process conditions from plume images during thin film formation, it is necessary to stably extract the plume region in the image. Image alignment is necessary to properly extract the plume region when there is a change in camera position. This paper reports on various image alignment methods and the estimation results of process conditions.