[23p-13M-1~17] 3.6 Laser processing (formerly 3.7)

4:30 PM - 4:45 PM JST(7:30 AM - 7:45 AM UTC)

[23p-13M-12] Study on microfabrication of polyimide using femtosecond laser processing

〇Masaki Uematsu¹, Vygantas Mizeikis^1,2, Saulius Juodkazis³, Junko Morikawa⁴ (1.Shizuoka Univ., 2.RIE, 3.SUT, 4.Tokyo Tech)

Keywords:

laser processing of polymer,polyimide,laser-induced carbonization