[23p-13M-1~17] 3.6 Laser processing (formerly 3.7)

3:45 PM - 4:00 PM JST(6:45 AM - 7:00 AM UTC)

[23p-13M-9] Deep learning model to determine laser irradiation conditions
for the formation of nano-periodic structure

〇(M1)Ryota Masuda¹, Yoshio Hayasaki¹, Satoshi Hasegawa¹ (1.Center for Optical Research and Education, Utsunomiya Univ.)

Keywords:

nano-periodic structure,deep learning

In this study, we constructed a deep learning model predicting scanning electron microscope (SEM) images of nano-periodic structures on silicon substrates corresponding to selected laser irradiation conditions. This learning model enables us to estimate the nano-periodic structures before the processing, which aids in rapid optimization of the laser irradiation conditions.