Presentation Information

[23p-22A-6]Liquid phase growth mechanism of SiGe films using printing and firing

〇(M1)Kohei Ito1, Satoru MIyamoto1, Shota Suzuki2, Hideaki Minamiyama2, Marwan Dhamrin2,3, Noritaka Usami1,4,5 (1.Grad.Eng., Nagoya Univ., 2.Toyo Aluminium K.K., 3.Osaka Univ., 4.InFuS, Nagoya Univ., 5.IMaSS, Nagoya Univ.)

Keywords:

silicon-germanium,epitaxial growth,liquid phase growth