[23p-32A-6~17] 17.1 Carbon nanotubes & other nanocarbon materials

2:15 PM - 2:30 PM JST(5:15 AM - 5:30 AM UTC)

[23p-32A-6] Microbolometer Type Infrared Detectors using Carbon Nanotubes

〇Tomo Tanaka^1,2, Masahiko Sano¹, Masataka Noguchi^1,2, Takashi Miyazaki^1,2, Megumi Kanaori², Toshie Miyamoto^1,2, Naoki Oda¹, Ryota Yuge^1,2 (1.NEC, 2.AIST)

Keywords:

Infrared detector,Carbon nanotube,MEMS