[23p-71A-1~11] Plasma Explores New Frontiers in Nano Particles and Quantum Dots

4:30 PM - 4:45 PM JST(7:30 AM - 7:45 AM UTC)

[23p-71A-8] Wavelength effect in radical nitridation of silicon by plasmonic plasma process

〇Takeshi Kitajima¹, Machiko Miyake¹, Toshiki Nakano¹ (1.Nat. Def. Acad.)

Keywords:

plasma,plasmon,dielectric film

We have developed a thin film formation method using gold nanoparticle plasmons in a plasma process, and have shown that hot electrons supplied from gold nanoparticles can form high-quality ultrathin films. This time, we will focus on the effect of the wavelength of light for plasmon excitation, and report the formation of high-quality films with green light excitation and damage formation with blue light excitation.