Presentation Information
[23p-P04-6]Characterization of Zinc Sulfide with Terbium Fluoride Deposited by CVD Synthesis
〇Takumi Fukuda1, Shin-ichi Yamamoto1, Koichi Wani1 (1.Ryukoku Univ.)
Keywords:
Inorganic EL,ZnS:TbF3
Inorganic EL is a device that is excited and emits light when an electric field is applied. In this study, we focused on the resistance heating evaporation method, which is advantageous for low melting point materials and can deposit films at about 10-2 Pa. We prepared ZnS:TbF3 thin films by using Zn and TbF3 metal particles as the deposition source, followed by sulfurization treatment. The ZnS:TbF3 thin film was then evaluated.