[23p-P04-1~18] 13.8 Optical properties and light-emitting devices

[23p-P04-7] Characterization of ZnS:Tb thin film prepared by CVD synthesis method

〇Gen Fujitsuka¹, Shin-ichi Yamamoto¹, Koichi Wani¹ (1.Ryukoku Univ.)

Keywords:

Inorganic EL

Inorganic EL is a device that emits light when a voltage is applied to an inorganic compound. Thin-film inorganic ELs are expected to have high brightness because the electric field strength applied to the light-emitting layer is high. In this study, we investigated the fabrication of ZnS:Tb green light-emitting layers by depositing Zn:Tb metal precursor thin films using a resistance heating evaporation system, which is advantageous for low melting point materials and can deposit films at about 10^-2Pa, and supplying sulfur (S) in a 6-zone tube furnace.