[24a-12B-1~12] CS.10 Code-sharing Session of 16.2 & KS.3

10:00 AM - 10:15 AM JST(1:00 AM - 1:15 AM UTC)

[24a-12B-5] A Study on MEMS Vibrational Energy Harvesters with Micro-Cavity Structures for Self-Assembled Electret Formation

〇Yuichiro Sunagawa¹, Kyoichi Kakuno¹, Satoru Hosoi¹, Ruichen Li¹, Reiki Sugimoto¹, Ayato Jingu², Aoi Ito², Yuya Tanaka², Daisuke Yamane¹ (1.Ritsumeikan Univ., 2.Gunma Univ)

Keywords:

Vibrational Energy Harvester,Self-Assembled Electret,Micro-Cavity