Presentation Information

[24a-1BM-3]Ultrasensitive Biosensing Based on Steep Subthreshold Slope of One-piece ITO-TFT

〇(M2)Ritsu Katayama1, Toshiya Sakata1 (1.The Univ. of Tokyo)

Keywords:

Indium Tin Oxide,biosensor,Thin Film Transistor

Solution-gated ITO-TFTs composed from a single ITO film can be easily fabricated by etching a part of a 100-nm conductive ITO film to thin it down to about 20 nm to exhibit semiconductor properties, which shows a steep subthreshold slope close to the thermal limit. This study attempted highly sensitive biosensing utilizing the steep subthreshold slope by measuring biomolecules modelled after DNA molecules.