Presentation Information

[24a-21C-2]The relationship between supplied Al/Ga molar ratio and AlN molar fraction in high-temperature AlGaN growth

〇(B)Yuto Matsubara1, Atsushi Tomita1, Koki Fujii1, Yusuke Takayanagi1, Yuusuke Takashima1,2, Yoshiki Naoi1,2, Kentaro Nagamatsu1,2 (1.Tokushima Univ., 2.pLED)

Keywords:

AlGaN,MOVPE