[24a-21C-1~9] 15.4 III-V-group nitride crystals

9:30 AM - 9:45 AM JST(12:30 AM - 12:45 AM UTC)

[24a-21C-3] High-temperature growth of AlN by TMA pulse supply

〇Yusuke Takayanagi¹, Atsushi Tomita¹, Koki Fujii¹, Yuto Matsubara¹, Yuusuke Takashima^1,2, Yoshiki Naoi^1,2, Kentaro Nagamatsu^1,2 (1.Tokushima Univ., 2.pLED, Tokushima Univ.)

Keywords:

semiconductor,III-V nitrides,MOVPE