[24a-P04-1~6] 3.6 Laser processing (formerly 3.7)

[24a-P04-3] Raman Spectroscopy of the Si Solar Cells with Nano Dot Structures Produced by Nanosecond UV Laser Pulses

〇Mitsuhiro Kusaba¹, Kenta Hirai¹, Tomoyo Tanaka¹, Daisuke Tsutsumi¹, Masaki Hashida^2,3, Hitoshi Sakagami⁴ (1.Osaka Sangyo Univ., 2.RIST, Tokai Univ., 3.ICR, Kyoto Univ., 4.NIFS)

Keywords:

silicon solar cell,nano dot structure,Raman spectrum

A KrF excimer laser was used to form a nano dot structures of 100 nm or less on the pyramidal structure of a silicon solar cell surface and Raman spectroscopy was performed to evaluate the crystallinity of the silicon solar cells with the nano dot structure. It was found that the peak wavenumber of the Raman spectrum of Si solar cells irradiated with laser shifts to the higher wavenumber side.