Presentation Information
[24a-P05-5]Common-path phase-shifting interference microscope using a low-coherence light source
〇Jun Chen1, Daigo Hishiyama1, Mitsunori Toyoda1 (1.Tokyo Polytech. Univ.)
Keywords:
Interference measurement,broadband superluminescent diode
We have developed a transmission type common-path phase-shifting interference microscope using a broadband superluminescent diode (SLD) as a light source. In the system, the object beam and reference beam pass through almost the same optical path, making it possible to perform highly stable and highly accurate phase measurements without being affected by vibrations or air fluctuations. Furthermore, by using an SLD that combines the advantages of lasers and LEDs, noise caused by laser interference is greatly reduced, making ultra-high precision measurements possible.