Presentation Information
[24a-P06-7]Surface Plasmon Resonance in ITO Grating Coupler Fabricated by the Combination of Thermal Nanoimprint Lithography and Reactive Plasma Deposition
〇Noriyuki Hasuike1, Takeshi Maeda1, Yugo Okada2, Makoto Maehara2, Kimio Kinoshita2, Minoru Takeda1 (1.Kyoto Inst. Tech., 2.Sumitomo Heavy Industries, Ltd.)
Keywords:
Surface Plasmon Resonance,Thermal Nanoimprint Lithography,Reactive Plasma Deposition