Presentation Information
[24a-P09-1]Optical properties of microstructured copper-oxide thin films prepared by glancing-angle deposition
〇Yamato Sakamoto1, Yasushi Inoue1, Osamu Takai2 (1.Chiba Inst Technol., 2.Kanto Gakuin Univ.)
Keywords:
Discrete Columnar Structure,glancing-angle deposition,copper oxide
The objective of this study was to investigate the optical properties of copper oxide thin films, which have been reported to exhibit p-type semiconductor characteristics, prepared using an RF magnetron sputtering system. At an oxygen flow rate of 0.10 sccm, the Cu2O crystalline phase was observed, and at 0.40 sccm, the CuO phase became dominant, with optical gaps of 2.02 eV and 1.48 eV, respectively, consistent with the reported band gaps and corresponding XRD results.