Presentation Information
[24a-P09-2]Effects of Deponsition Pressure on EC Properties on InN Films Fabricated by Glancing-angle Reactive Evaporation
〇Mayuki Nisio1, Yasushi Inoue1, Osamu Takai2 (1.Chiba Inst. Technol, 2.Kanto Gakuin Univ.)
Keywords:
InN
InN is known to exhibit EC phenomena. The objective of this study was to investigate the changes in the EC properties of InN thin films by controlling the deposition pressure and by changing the crystallinity, porosity and shape of the columnar crystals. It was observed that the topmost surface became larger and smoother with increasing deposition pressure, and the voids between the columnar crystals decreased. It is known that InN exhibits EC phenomenon. The objective of this study was to investigate the changes in the crystallinity, columnar voids, and shape of InN thin films by controlling the deposition pressure, and to investigate the accompanying changes in EC properties. It was observed that the topmost surface became larger and smoother with increasing deposition pressure, and the voids between the columnar crystals decreased. The amorphous peaks decreased and the crystallinity became better with increasing deposition pressure.