[24a-P12-1~3] 15.5 Group IV crystals and alloys

[24a-P12-2] Formation of SiGe buffers on Si(111) and crack suppression toward high-mobility stained Ge channels

〇Yuichi Yoshida¹, Souitiro takei¹, kentaro sawano¹ (1.Tokyo City Univ)

Keywords:

SiGe/Ge stracture