The 71st JSAP Spring Meeting 2024
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Fri. Mar 22, 2024
Sat. Mar 23, 2024
Sun. Mar 24, 2024
Mon. Mar 25, 2024
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[24a-P12-3]
Effects of annealing on crack generation in strained SiGe formed by patterning method
〇Seiga Arai
1
, Masaki Nagao
1
, Kentaro Sawano
1
(1.Tokyo City Univ.)
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Keywords:
Germanium(111)
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