[24a-P12-1~3] 15.5 Group IV crystals and alloys

[24a-P12-3] Effects of annealing on crack generation in strained SiGe formed by patterning method

〇Seiga Arai¹, Masaki Nagao¹, Kentaro Sawano¹ (1.Tokyo City Univ.)

Keywords:

Germanium(111)