[24p-12B-1~15] CS.1 Code-sharing Session of 2.3 & 7.4

5:00 PM - 5:15 PM JST(8:00 AM - 8:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[24p-12B-13] Dry atomic layer etching of Cu films by neutral cluster beam

〇Keisuke Ikeda¹, Hideyuki Tanaka¹, Masaya Takeuchi¹, Noriaki Toyoda¹ (1.University of Hyogo)

Keywords:

neutral cluster beam,etching,surface reaction