[24p-12B-1~15] CS.1 Code-sharing Session of 2.3 & 7.4

5:15 PM - 5:30 PM JST(8:15 AM - 8:30 AM UTC)

[24p-12B-14] High sensitivity SEM/EDS detection of liquids using an ultra-thin electron beam transmission window by GCIB irradiation

〇Masaya Takeuchi¹, Suzuki Satoru², Toyoda Noriaki¹ (1.Univ. of Hyogo, 2.LASTI,Univ. of Hyogo)

Keywords:

Gas cluster ion beam,Silicon nitride,Solution chemistry

Using a liquid cell with a SiNx membrane as an electron transmission window, XPS analysis and SEM observation of liquid samples in vacuum are possible. In this study, we conducted a burst pressure test of the ultra-thinned SiNx membrane using a gas cluster ion beam (GCIB), which can perform dry etching with low damage. Furthermore, a proof-of-principle demonstration of the high sensitivity liquid sample detection using the SiNx membrane thinned by GCIB irradiationl was performed by SEM/EDS.