[24p-12C-1~12] 1.5 Instrumentation, measurement and Metrology

4:30 PM - 4:45 PM JST(7:30 AM - 7:45 AM UTC)

[24p-12C-12] Evaluation of the Responsiveness of Thermal Conductivity Humidity Sensor with an Ultrafine Platinum Wire Microheater Installed in its Through Flow Path

〇Katsuhisa Toshima¹ (1.TIRI)

Keywords:

microheater,humidity sensor,thermal conductivity sensor