[24p-21B-1~12] 22.1 Joint Session M "Phonon Engineering"

1:15 PM - 1:30 PM JST(4:15 AM - 4:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[24p-21B-2] Estimation of Thermal Contact Resistance in Thermal Diffusivity Measurement by Probe Type TWA Method

〇Ryota Morioka¹, Shuji Kamegaki¹, Meguya Ryu², Junko Morikawa¹ (1.Tokyo Tech, 2.AIST)

Keywords:

Thermal diffusivity,Chemically amplified resist,Thermal contact resistance

In the probe type TWA method, which enables local thermal diffusivity measurement of soft materials, it is important to keep the contact condition between the sample and the sensor constant. In this study, the distance between the sample and sensor was precisely controlled by a piezo stage while measuring the temperature wave signal to investigate the effect of contact conditions on the thermal diffusivity measurement. Thermal contact resistance was estimated by comparison with calculated values.