[24p-22C-1~10] 12.5 Organic and hybrid solar cells

3:15 PM - 3:30 PM JST(6:15 AM - 6:30 AM UTC)

[24p-22C-6] High conversion efficiency of perovskite solar cells Using four targets facing sputtering cathode

〇Futa Kobayashi¹, Yoshiki Nishida¹, Tetsuya Saruwatari¹ (1.Keihin ramtech)

Keywords:

Low damage sputtering,Facing target,RAM force cathode

The dry processing of perovskite solar cells is desired. Four facing sputtering cathode was employed for the formation of each layer. In the TCO layer, it demonstrated low damage and conversion efficiency comparable to damage-free evaporation methods. In the HTL layer, an improvement in conversion efficiency was observed compared to organic materials. The unique configuration suggests that achieving enhanced conversion efficiency in dry processes is possible through the formation of low-damage and low-defect films.