[24p-31B-1~15] 8.5 Plasma phenomena, emerging area of plasmas and their new applications

1:30 PM - 1:45 PM JST(4:30 AM - 4:45 AM UTC)

[24p-31B-1] Hysteresis of electron swarm in HBr under DC electric field

〇Kazuki Denpoh¹ (1.Tokyo Electron Technology Solutions Ltd.)

Keywords:

discharge,hysteresis,electron swarm

A phenomenon of hysteresis was found in the electron swarm analyzed under DC electric fields in HBr, which is a common etching gas. A Monte Carlo method was used for the swarm analysis. The cross-sections for vibrational excitation and dissociative electron attachment in the low electron energy range must be the main cause of the hysteresis. In actual DC and RF discharges, and in discharge simulations in spatial one-dimension or more, the hysteresis may not appear because of the inflow of energetic electrons from other locations. The discovery is recorded in the hope that it will lead to further discussion and development.