[24p-P02-1~13] 6.2 Carbon-based thin films

[24p-P02-4] Exploration of the carbon structure model by two-dimensional mapping of DLC films using the HF-HiPIMS method

〇Hiroyuki Fukue¹, Yoshihisa Osano^2,1, Susumu Takabayashi³, Tadayuki Okano⁴, Masahide Kuroiwa⁴, Shinsuke Kunitsugu⁵, Hiroki Oota⁶, Ken Yonezawa^6,1, Tatsuyuki Nakatani¹ (1.Okayama Univ. of Sci., 2.Mitsubishi Pencil Co., Ltd, 3.National Inst. Technol., Ariake College, 4.Tokyo Electronics Co., Ltd., 5.Ind. Technol. Cent. Okayama Pref., 6.Kenix Corporation)

Keywords:

diamond-like carbon,Raman spectroscopy,high-power impulse magnetron sputtering

We are investigating the Raman spectral analysis of DLC (diamond-like carbon) films using the HF-HiPIMS (high-frequency inclusion high-power impulse magnetron sputtering) method. In this study, we report our exploration of carbon structure model by two-dimensional Raman mapping of DLC films using the HF-HiPIMS method. The D band area ratio of two-dimensional Raman mapping decreased with increasing film density. This suggests that the incident ions become stronger as the film density increases. This result shows the same trend as the sp² cluster model considered from the pinpoint measurements.