[24p-P02-1~13] 6.2 Carbon-based thin films

[24p-P02-5] Application of nonlinear least squares for five-peak fitting analysis on Raman spectrum of DLC films deposited by the AC-HV-CVD method

〇Yoshihisa Osano^1,2, Hiroyuki Fukue², Susumu Takabayashi³, Shinsuke Kunitsugu⁴, Yuichi Imai^5,2, Tatsuyuki Nakatani² (1.Mitsubishi Pencil Co.,Ltd., 2.Okayama Univ. of Sci., 3.National Inst. Technol., Ariake College, 4.Ind. Technol. Cent. Okayama Pref., 5.STRAWB Co., Ltd.)

Keywords:

diamond-like carbon,Raman spectroscopy,alternating current high voltage burst plasma chemical vapor deposition

In this study, the focus was on the automation of the five-peak fitting analysis of Raman spectra on DLC (diamond-like carbon) films deposited by the AC-HV-CVD (alternating current high voltage burst plasma chemical vapor deposition) method. The automation method utilizing NLS (nonlinear least squares) technique achieved higher accuracy than the conventional manual analysis. This is demonstrated by the improvement in coefficient of determination (R²) and χ² values obtained through automated analysis. These results suggest enhanced reproducibility and efficiency in the five-peak fitting analysis of Raman spectra on DLC films.