Presentation Information
[24p-P02-7]Change in the Free Volume of Highly Hydrogenated DLC Films by Soft X-ray Irradiation and Temperature Increase
〇Kazuhiro Kanda1, Daisuke Niwa1, Tomohiro Mishima1, Koji Nakanishi1, Naoki Fukumuro2, Fuminobu Hori3, Atsushi Yabuuchi4, Atsushi Kinomura4 (1.Lasti, Univ. Hyogo, 2.Eng., Univ. Hyogo, 3.Osaka Metropolitan Univ., 4.KURNS, Kyoto Univ.)
Keywords:
diamond-like carbon film,positron annihilation spectroscopy,free volume
The dependences of the free volume in highly hydrogenated diamond-like carbon (H-DLC) films on soft X-ray irradiation dose and temperature increase were observed using slow positron beams to investigate whether there is a difference in the structural change in H-DLC films between hydrogen desorption upon soft X-ray irradiation and that upon temperature increase. We found that hydrogen desorption by temperature rise increases both the S-parameter and the positron annihilation lifetime, whereas hydrogen desorption by soft X-ray irradiation decreases the S-parameter despite an increase in the positron annihilation lifetime.