Presentation Information
[24p-P02-8]Effect of Atomic Hydrogen Exposure on Hydrogenated Diamond-Like Carbon Films
〇Yuichi Haruyama1, Akira Heya2, Koji Sumitomo2, Noriaki Toyoda2, Seigo Ito2 (1.LASTI, Univ. of Hyogo, 2.Grad. School of Eng., Univ. Hyogo)
Keywords:
diamond like carbon
The effect of atomic hydrogen exposure on the hydrogenated diamond-like carbon (DLC) films was investigated using photoelectron spectroscopy. Although a peak in the C 1s core-level photoelectron spectrum of the hydrogenated DLC film was located at 284.6 eV before atomic hydrogen exposure, it shifted at 285.2 eV after atomic hydrogen exposure. This indicates that the surface of the hydrogenated DLC film is predominantly composed of sp3 hybridized carbon atoms after atomic hydrogen exposure. The details of the atomic hydrogen exposure of hydrogenated DLC films will be discussed in the presentation.