Presentation Information
[24p-P02-9]Electrical Insulating Properties for Thickness of Polymer-Like Carbon Thin Films Prepared by Radio-Frequency Plasma CVD Process
〇(M1)EITO ICHIJO1, KAZUYA KANASUGI1, ALI ALANAZI2, KENJI HIRAKURI1 (1.Denki Univ., 2.King Saud Univ.)
Keywords:
DLC,electrical insulation