Presentation Information
[24p-P03-5]Observation of structures on Pt deposited [EMIm]Tf2N/Si surface with annealing
〇(B)Hiroyuki Kimachi1, Kiyotada Matsuura1, Miki Watanabe1, Fumiya Yamanaka1, Koichi Sugiyama1, Masamichi Naitoh2, Tomonori Ikari1 (1.NIT, Ube College, 2.Kyushu Inst. of Tech.)
Keywords:
ionic liquid,nano particles,surface structure
We have observed Pt/ionic liquid (IL)/Si(100) surfaces were annealed in the air. Pt was deposited up to 40 nm by magnetron sputtering on IL dropped Si(100) substrate. The surface structures at these samples were observed by scanning electron microscope (SEM) and energy dispersive x-ray spectroscopy (EDS). In this study, we investigated the behavior of nanoparticles on the surface with increasing the amount of Pt deposition and the annealing temperature.