Presentation Information
[24p-P08-4]Effects of Additional Gases on the Negative Ions Generated by Atmospheric Pressure Helium Plasmas
〇(B)Kokone Michikura1, Xing Ying Low1, Kenkichi Nagato1, Hirofumi Kurita2 (1.Natl. Inst. Tech. Kochi Col., 2.Toyohashi Univ. Tech.)
Keywords:
Atmospheric Pressure Plasma,Mass Spectrometry,Reactive Species
To analyze the reactive species generated by atmospheric pressure helium plasma jets, we analyzed negative ion mass spectra in the plasma jet by adding nitrogen or oxygen to helium. Measurements were made under different conditions of humidity, value of applied voltage, irradiation distance, and flow rate of the added gas, and the composition changes in negative ions under each condition were investigated.