The 71st JSAP Spring Meeting 2024
Advanced Search

Session Details

Poster presentation8 Plasma Electronics : 8.1 Plasma production and diagnostics

[24p-P08-1~9]8.1 Plasma production and diagnostics

Sun. Mar 24, 2024 4:00 PM - 6:00 PM JST
Sun. Mar 24, 2024 7:00 AM - 9:00 AM UTC
P08 (Building No. 9)

[24p-P08-1]Breakdown and discharge sustaining power of weakly depressurized microwave plasma with high velocity gas flow

〇Kenji Nakabayashi1, Taina Ogawa1, Haruka Suzuki1,2, Hirotaka Toyoda1,2,3 (1.Nagoya Univ, 2.cLPS Nagoya Univ, 3.NIFs)

[24p-P08-2]Diagnosis of RF Low Pressure Tetraethoxysilane Plasma for SiO2 Deposition
Measurement of Incident Radical and Positive Ion Species to the Substrate

〇Toshizo Nara1, Tatuya Takiguti2, Akinori Oda2 (1.Chiba Institute of Technology M.S., 2.Chiba Institute of Technology Univ.)

[24p-P08-3]Measurements of Plasma Characteristics in Atmospheric Pressure Plasma Jet Applied External Electric Field

〇HIROMASA YAMADA1 (1.NIT, Nagano College)

[24p-P08-4]Effects of Additional Gases on the Negative Ions Generated by Atmospheric Pressure Helium Plasmas

〇(B)Kokone Michikura1, Xing Ying Low1, Kenkichi Nagato1, Hirofumi Kurita2 (1.Natl. Inst. Tech. Kochi Col., 2.Toyohashi Univ. Tech.)

[24p-P08-5]Consideration of the structure of slot antennas and T-shaped gas-introducing metal pipes using electromagnetic field simulation

〇Hirochika Uratani1, Erdenezaya Bat Orgil1, Yasunori Tanaka1, Yusuke Nakano1, Tatsuo Ishijima1 (1.Kanazawa Univ.)

[24p-P08-6]Measurement of Gas Temperature in Hollow Cathode Discharges by Tunable Diode Laser Absorption Spectroscopy

〇Yoshinobu Matsuda1, Yuya Soga1, Tamiko Oshima1 (1.Nagasaki Univ.)

[24p-P08-7]Development of simultaneous measurement for multi-component ions in deep oscillation magnetron sputtering using a reflectron time-of-flight mass spectrometer

〇(B)Hiroki Kobayashi1, Yuki Nakagawa1, Eisuke Yokoyama1, Nobuo Nishimiya1, Masaomi Sanekata1, Masahide Tona2, Hiroaki Yamamoto2, Keizo Tsukamoto2, Kiyokazu Fuke3, Keijiro Ohshima4, Fuminori Misaizu4 (1.Tokyo Polytech Univ., 2.Ayabo Corp., 3.Kobe Univ., 4.Tohoku Univ.)

[24p-P08-8]Analysis of gas rarefaction phenomenon in deep oscillation magnetron sputtering (DOMS) using an optical-emission delay time measurement

〇Eisuke Yokoyama1, Kaede Horiuchi1, Yusei Takahashi1, Yuki Nakagawa1, Nobuo Nishimiya1, Masaomi Sanekata1, Masahide Tona2, Hiroaki Yamamoto2, Keizo Tsukamoto2, Kiyokazu Fuke3, Keijiro Ohshimo4, Fuminori Misaizu4 (1.Tokyo Polytech. Univ., 2.Ayabo Corp., 3.Kobe Univ., 4.Tohoku Univ.)

[24p-P08-9]Plasma diagnosis in high power pulsed magnetron sputtering(HPPMS) using laser-induced fluorescence method

〇(B)yuuki nakagawa1, Hiroki Kobayasi1, Eisuke Yokoyama1, Nobuo Nishiniya1, Masaomi Sanekata1, Masahide Tona2, Hiroaki Yamamoto2, Keizo Tsukamoto2, Kiyokazu Fuke3, Keijiro Ohshimo4, Fuminori Misaizu4 (1.Tokyo Polytech. Univ., 2.Ayabo Corp., 3.Kobe Univ., 4.Tohoku Univ.)
Back to Category List