Presentation Information
[24p-P12-1]Exploration of the Effect of Composition on Elastic Properties of Silicon Oxynitride Films Using a Universal Neural Network Potential
〇Sakurako Miyazaki1, Keigo Ogawa1, Hiroki Sakakima1, Satoshi Izumi1 (1.Univ. of Tokyo)
Keywords:
silicon oxynitride film,amorphous,graph neural network
In this study, we investigated the relationship between composition in amorphous SiON and the elastic modulus, and discussed the relationship between the elastic modulus and the atomic-level network structure. Interatomic potentials of graph neural networks were used to create the structures. The bulk modulus of amorphous SiON varied from 45 to 140 GPa depending on the composition, and the higher the fraction of N atoms, the larger the bulk modulus.