The 71st JSAP Spring Meeting 2024
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Session Details

Poster presentation13 Semiconductors : 13.3 Insulator technology

[24p-P12-1~3]13.3 Insulator technology

Sun. Mar 24, 2024 4:00 PM - 6:00 PM JST
Sun. Mar 24, 2024 7:00 AM - 9:00 AM UTC
P12 (Building No. 9)

[24p-P12-1]Exploration of the Effect of Composition on Elastic Properties of Silicon Oxynitride Films Using a Universal Neural Network Potential

〇Sakurako Miyazaki1, Keigo Ogawa1, Hiroki Sakakima1, Satoshi Izumi1 (1.Univ. of Tokyo)

[24p-P12-2]Effect of additional ethanol vapor in NH3 gas annealing on reduction of residual OH groups
in low-temperature Si oxide films

〇Susumu Horita1 (1.JAIST)

[24p-P12-3]Activation energy for inter-site jumping of ions and molecules in SiNx and SiOx films

〇Tomoki Oku1, Masahiro Totsuka1, Hajime Sasaki1 (1.Mitsubishi Electric)
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