Presentation Information

[24p-P15-7]Study of Codoped Silicon-on-Insulator Thin Films for Nano Transistor Functionality

〇(M1)Reon Asai1, Syun Masui1, Shogo Miyagawa2, Daris Alfafa1,2, Moraru Daniel1,2 (1.Sizuoka univ., 2.elec inst.)

Keywords:

semiconductor,transistor,quantum dot

We have analyzed the effect of B doping on highly co-doped SOI-FETs. In the future, the effect of boron should be improved in order to operate single electron tunneling with higher yields.