[25a-12F-1~9] 6.4 Thin films and New materials

11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)

[25a-12F-9] Cross-Sectional Observation of Copper Particles Synthesized on Silicon Nitride

〇Kyouichi a Shibata¹, Ken Ishida¹, Reo Kimura¹, Atsushi Nakamura^2,1, Keiji Komatsu¹, Hidetoshi Saitoh¹ (1.Nagaoka Univ. Tech., 2.Chubu Chelest Co., Ltd.)

Keywords:

Silicon Nitride,Copper Particles,EDTA