[25p-12H-1~12] 6.2 Carbon-based thin films

4:30 PM - 4:45 PM JST(7:30 AM - 7:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[25p-12H-12] Conductivity change of amorphous carbon thin films deposited on polymeric substrates under gas pressure loading

〇Ayumu Takada¹, Souta Nakagawa¹, Sarayut Tunmee², Shuji Obata¹, Kenji Hirakuri¹, Yasuharu Ohgoe¹ (1.Tokyo Denki Univ., 2.Synchrotron Light Research Inst.)

Keywords:

Diamond-like carbon,NEXAFS spectroscopy

DLC was deposited on various polymer substrates under the same conditions, and the substrate dependence of DLC was investigated in terms of electrical properties. DLC films deposited on polymer substrates with benzene rings showed lower resistivity and conductivity, and NEXAFS analysis of the film structure showed that the sp^2 bond ratio was higher than that of the polymer substrates. These results suggest that the sp^2 structure ratio of DLC differs depending on the polymeric substrate, and that the conductivity imparted by pressure loading also differs accordingly.