[25p-12H-1~12] 6.2 Carbon-based thin films

3:30 PM - 3:45 PM JST(6:30 AM - 6:45 AM UTC)

[25p-12H-8] Effect of delay time of input pulse on deposition of diamond-like carbon film using high-power pulsed magnetron sputtering

〇Takayuki Ohta¹, Hiro Kunieda¹, Shiro Matsumoto¹, Akinori Oda², Hiroyuki Kousaka³ (1.Meijo Univ., 2.Chiba Inst. Technol., 3.Gifu Univ.)

Keywords:

sputtering,diamond-like carbon