[25p-12H-1~12] 6.2 Carbon-based thin films

3:45 PM - 4:00 PM JST(6:45 AM - 7:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[25p-12H-9] Dependence of Number of Turns of Coiled Anode on Preparation of Hydrogen-Free DLC Film by Vacuum Arc Deposition

〇Seiya Watanabe¹, Jumpei Kito¹, Genki Sano¹, Mirano Oneda¹, Takahiro Bando¹, Hirofumi Takikawa¹, Hiroaki Sugita², Takahiro Hattori², Hiroki Gima² (1.Toyohashi Univ. Technol., 2.OSG Co., Ltd.)

Keywords:

DLC,Vacuum arc deposition system,Coiled anode

Experiments were conducted using vacuum arc deposition system with a coiled anode. ta-C films were prepared by changing the number of turns of the coiled anode and using this equipment. Film thickness was determined by calottes, while surface analysis was performed using a digital microscope. The experimental results revealed that the deposition rate was higher when the number of coiled anode turns was increased. Simultaneously, it was observed that the number of droplets relative to the film thickness decreased.