Presentation Information

3:15 PM - 3:30 PM JST(6:15 AM - 6:30 AM UTC)

[25p-12M-8]Development of three-dimensional micro-X-ray topography using focused sheet-shaped X-ray beam

〇Akio Yoneyama^1,2, Kumiko Konishi¹, Akio Shima¹, Daiko Takamatsu¹ (1.Hitachi, 2.SAGA LS)

Keywords:

Topography,Three simensional

We has been newly developed a novel three-dimensional micro X-ray topography (3D m-XRT) by combining the section topography method and sheet X-rays focused by a one-dimensional focusing mirror.

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